ELECTRON SOURCE, ITS MANUFACTURING METHOD, AND FLAT IMAGE PICKUP ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an electron source capable of realizing a photoconductive type flat image pickup element with shading and degradation of resolution reduced; to provide its manufacturing method; and to provide the flat image pickup element.

SOLUTION: In this electron source 10, its region on a substrate 12 is divided into: a rectangular region A1 corresponding to a scanning region of a photoelectric conversion part; a frame-like region A2 corresponding to a non-scanning region thereof; and the outermost peripheral region A3. Electron emission sources 32 are formed on first cathode electrodes 14a-14d in the rectangular region A1 by facing them to first gate electrodes 26a-26d, and electron emission sources 35 are formed on second cathode electrodes 18a-18d and the like in the frame-like region A2 by facing them to a second gate electrode 30.

COPYRIGHT: (C)2004,JPO