| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope apparatus which suppresses a thermal drift and noise due to oscillation in a stopping period of a stage and also uses an inexpensive sample stage. SOLUTION: The sample stage 3 is constituted of a base 4 provided with a guide mechanism 7, a table 5 to move along the guide mechanism 7, and a rod 9 as a drive mechanism to drive the table 5. A gap 12 is provided at a joint part between the guide part 11 of the table 5 and the rod 9 as the drive mechanism. Further, a control unit 100 makes positional control to mechanically separate the joint between the table 5 and the drive mechanism, using the gap 12, when the table 5 is stopped. COPYRIGHT: (C)2004,JPO
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