METHOD FOR DETERMINING BEAM SIZE OF ELECTRON EMISSION SOURCE TO DATA MEMORY MEDIUM

摘要

PROBLEM TO BE SOLVED: To maintain the beam size of an electron emission source constant. SOLUTION: The method determines the beam size of the electron emission source for the purpose of the data memory medium (400). The electron emission source having an emission beam is moved to cross a conductor of a detector (402). The current flowing through the conductor due to the emission beam when the electron emission source moves across the detector is measured (404). The size of the emission beam of the electron emission source is determined in accordance with the position of the electron emission source and the measured current (406). COPYRIGHT: (C)2004,JPO