| 摘要 |
PROBLEM TO BE SOLVED: To position-control a stage with accuracy, in a moving device that moves an article, such as the substrate, component, etc., by placing the article on the stage. SOLUTION: The moving device is provided with first actuators 8 and 8' having movers 2 and 2' and stators 1 and 1' and a second actuator which drives the stators 1 and 1', respectively. The second actuator drives the stators 1 and 1' in the direction in which rotations of the stators 1 and 1' accompanying the movement of the movers 2 and 2' are suppressed. COPYRIGHT: (C)2004,JPO |
