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发明名称
Vorrichtung zur Erzeugung eines ebenen Plasmas unter Verwendung variierender Magnetpole
摘要
申请公布号
DE19509284(B4)
申请公布日期
2004.04.29
申请号
DE19951009284
申请日期
1995.03.15
申请人
OGLE, JOHN S.
发明人
OGLE, JOHN S.
分类号
H05H1/46;C23C16/56;C23F4/00;H01J37/32;H01L21/205;H01L21/265;H01L21/302;H01L21/3065;H05H1/24;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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