| 摘要 |
Embodiments of the invention provide a liquid delivery system. The liquid delivery system generally includes a plurality of vessels flexibly coupled to a frame to provide vibration isolation therefrom. In one embodiment, the liquid delivery system includes tubing coupling liquids to/from the plurality of vessels, wherein the tubing is selected to minimize the transmission of mechanical noise to the plurality of vessels. In another embodiment, the liquid delivery system includes a controller adapted to monitor and control the delivery of the liquids throughout the system. In another embodiment, a method is provided to deliver liquids from storage vessels to substrate processing systems. Generally, the liquid delivery is completed using a first delivery step and a second delivery step wherein the amount of liquid delivered during the second delivery step is determined using the amount of liquid delivered from the first delivery step and controller by time to minimize the impacts of signal noise and delivery delay.
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