Filter using micro-mechanical resonator

摘要

An electric signal fed into a line generates electric field in response to its frequency, and a resonator placed closely to the line and in a substantially vacuum condition not higher than 100 pascal is excited by electrostatic force of the electric field and vibrates. Detecting means converts mechanical vibrations of the resonator into a signal in another form than the electric signal, then it detects the vibrations. The foregoing structure allows the resonator to be a micro-body and to process properly a high-frequency input signal of MHz or GHz band. A tight space between an input side and an output side does not permit an electric signal fed into the line to couple directly to the output side, and the resonator downsized to a micro-body is not subject to viscosity of air.