METHOD OF SHALLOW TRENCH ISOLATION,申请号SG19980005582-传众专利搜索

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发明名称	METHOD OF SHALLOW TRENCH ISOLATION
摘要
申请公布号	SG103239(A1)	申请公布日期	2004.04.29
申请号	SG19980005582	申请日期	1998.12.11
申请人	CHARTERED SEMICONDUCTOR MANUFACTURING LTD	发明人	HENRY GERUNG;IGOR V. PEIDOUS;THOMAS SCHUELUE;ANDREW KUSWATNO
分类号	H01L21/3105;H01L21/762;(IPC1-7):H01L21/76	主分类号	H01L21/3105
代理机构		代理人
主权项
地址

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