Chemisch inerte Strömungssteuerung mit kontaminationsfreiem Gehäuse

摘要

A fluid control module that may be connected in-line within a chemically corrosive or ultra pure fluid flow circuit that delivers fluids in either a liquid or gaseous state. The fluid control module of the present invention may be utilized to control the flow, pressure or volume of fluid flowing through the fluid flow circuit and is capable of automatically adjusting or "calibrating" the module to compensate for changes in atmospheric pressure or drift in the pressure sensors of the fluid control module. The fluid control module also includes a rapid or macro adjustment of the control valve to reach the desired flow rate at a quicker pace.