摘要 |
A method for forming an image sensor with concave micro-lenses is disclosed. The method comprises forming a plurality of pixels in a semiconductor substrate, each pixel including a light sensitive element. Next, a base material is formed over the pixels, the base material having a first index of refraction. A micro-lens cavity is formed in the base material over each light sensitive element. The micro-lens cavity has a concave shape. Finally, a filler material is formed into the micro-lens cavities. The filler material has a second index of refraction that is higher than the first index of refraction.
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