发明名称 Method for forming an image sensor having concave-shaped micro-lenses
摘要 A method for forming an image sensor with concave micro-lenses is disclosed. The method comprises forming a plurality of pixels in a semiconductor substrate, each pixel including a light sensitive element. Next, a base material is formed over the pixels, the base material having a first index of refraction. A micro-lens cavity is formed in the base material over each light sensitive element. The micro-lens cavity has a concave shape. Finally, a filler material is formed into the micro-lens cavities. The filler material has a second index of refraction that is higher than the first index of refraction.
申请公布号 US2004082096(A1) 申请公布日期 2004.04.29
申请号 US20020281012 申请日期 2002.10.25
申请人 YAMAMOTO KATSUMI 发明人 YAMAMOTO KATSUMI
分类号 G02B5/20;H01L21/00;H01L23/00;H01L27/146;H01L31/0216;H01L31/0232;(IPC1-7):H01L21/00 主分类号 G02B5/20
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