System and method of measuring low impedances

摘要

Several sets of voltage measurement are obtained with respect to a periodic current waveform, generated by a pair of current levels. A clock frequency-dependent noise is determined from a Fourier component of the averaged measurements. A filtered average voltage is generated by removing the noise, whose Fourier component is divided by Fourier component of periodic current waveform to determine an impedance. Independent claims are also included for the following: (1) impedance determination method; and (2) impedance measurement system.