COOLANT LINE ASSEMBLY OF LID OF CHEMICAL VAPOR DEPOSITION EQUIPMENT

摘要

PURPOSE: A coolant line assembly of a lid of a CVD(Chemical Vapor Deposition) equipment is provided to be capable of preventing cooling water from flowing out of a manifold. CONSTITUTION: A coolant line assembly is provided with a process chamber lid, a manifold(200) installed at the process chamber lid for flowing cooling water into and out of the lid, a coolant line connected to the manifold for supplying the cooling water. The coolant line assembly further includes a packing part(400) inserted to an inlet port of the manifold when disassembling the coolant line from the manifold for preventing the cooling water from flowing out of the manifold. Preferably, a rubber packing is used as the packing part.