MAGNETIC SENSOR CAPABLE OF CONTROLLING RELIABLY OFF-SET VARIATIONS OF GMR ELEMENT AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A magnetic sensor and a manufacturing method thereof are provided to control reliably off-set variations of a bridge connection in a GMR(Giant MagnetoResistive) element regardless of the influence of an intense magnetic field by arranging a magnetization direction of a pinned layer in the element to be a predetermined angle on a longitudinal direction of the element. CONSTITUTION: A magnetic sensor(1) includes a substrate(2) and a plurality of GMR elements. Each GMR element includes at least one magnetoresistive element(31) on the substrate and a pair of permanent magnetic films(32) connected to both ends of the magnetoresistive element. The pair of permanent magnetic films is used for detecting a magnitude of an external magnetic field based on the influence of magnetoresistiveness on the magnetoresistive element. A magnetization direction of a pinned layer in the magnetoresistive element has 45 degrees on a longitudinal direction of the magnetoresistive element.