SILICON OPTICAL BENCH FOR PACKAGING OF OPTICAL SWITCH DEVICE, OPTICAL SWITCH PACKAGE USING THE SAME, MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A silicon optical bench for the packaging of an optical switch device, an optical switch package using the same, a manufacturing method thereof are provided to be capable of exactly carrying out an aligning process between the optical switch device, a light input part, and a light output part. CONSTITUTION: A silicon optical bench(100) includes a silicon substrate(110). At this time, the silicon substrate includes the first region for loading an optical switch device, the second region located at the first side of the first region for forming a light input part, and the third region located at the second side of the first region for forming a light output part. A vacant space(120) is formed through the silicon substrate at the first region. A plurality of grooves(131,132,133) formed on the silicon substrate at the second and third region for loading a lens and an optical fiber.