| 摘要 |
A micromirror actuator includes a substrate; two posts having predetermined heights and installed a predetermined distance apart on the substrate; a torsion bar ends of which are fixed to respective posts; a stopper extending from a portion of the torsion bar and contacting or coming apart from the surface of the substrate; a mirror connected to the middle portion of the torsion bar; parallel elements connected to the torsion bar being isolated from the mirror and causing the torsion bar to be distorted; and a magnet providing a rotation force to the parallel elements through being affected by an external magnetic field. Accordingly, the rotation characteristics of the mirror of the micromirror actuator of the present invention become insensitive to a change of the strength of the external magnetic field applied after the stopper contacts the surface, thereby uniformly maintaining the rotation angle of the mirror at a desired level.
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