发明名称 |
MAGNETRON ATOMIZATION SOURCE AND METHOD OF USE THEREOF |
摘要 |
For optimizing the yield of atomized-off material on a magnetron atomization source, a process space, on the source side, is predominantly walled by the atomization surface of the target body. The magnetron atomization source has a target body with a mirror-symmetrical, concavely constructed atomization surface with respect to at least one plane and a magnetic circuit arrangement operable to generate a magnetic field over the atomization surface. The magnetic circuit arrangement includes an anode arrangement, a receiving frame which extends around an edge of the target body and is electrically insulated with respect thereto. The receiving frame has a receiving opening for at least one workpiece to be coated. The magnetron source can be used to provide storage disks, such as CDs, with an atomization coating.
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申请公布号 |
CA2145570(C) |
申请公布日期 |
2004.04.27 |
申请号 |
CA19952145570 |
申请日期 |
1995.03.27 |
申请人 |
BALZERS AKTIENGESELLSCHAFT |
发明人 |
GRUNENFELDER, PIUS;HIRSCHER, HANS;SCHWENDENER, URS;HAAG, WALTER |
分类号 |
C23C14/34;C23C14/35;H01J37/34;(IPC1-7):H01J25/50;G11B7/26;H01J37/317 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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