CAPACITOR STRUCTURE AND METHOD FOR PRODUCING THE SAME USING DUAL DAMASCENE PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a capacitor structure and a method for producing the structure using a dual damascene process. SOLUTION: In the apparatus and production process, a capacitor is formed using a dual damascus process. A bottom plate of the capacitor is electrically connected to an upper first conductive via that is formed according to the dual damascene process. A top plate of the capacitor is connected to an upper second conductive via. A dielectric material is disposed between the top and bottom plates. COPYRIGHT: (C)2004,JPO