LUMINOUS FLUX SHAPING OPTICAL SYSTEM AND EXPOSURE HEAD

摘要

PROBLEM TO BE SOLVED: To provide a luminous flux shaping optical system which reduces light quantity loss by shaping incident luminous flux into rectangularly sectioned parallel luminous flux without lowering depth of focus, and also to provide an exposure head to reduce the light quantity loss and to carry out exposure with high resolution by using the luminous flux shaping optical system. SOLUTION: Using the luminous flux shaping optical system which shapes the circularly sectioned luminous flux into the rectangularly sectioned parallel luminous flux by widening the luminous flux width in a diagonal direction (arrow direction) reduces the light quantity loss small and deepens the depth of focus as compared with a case of using a fly-eye lens. COPYRIGHT: (C)2004,JPO