MICROMECHNICAL COMPONENT AND METHOD FOR PRODUCING THE SAME

摘要

The invention relates to a micromechanical component comprising a substrate (1), at least one membrane (8), and a cavity (6) which is arranged between the substrate (1) and the membrane (8), said membrane (8) being suspended over the cavity (6) by means of springs (9). The inventive micromechnical component is advantageous in that a stress gradient present in the membrane layer can only have a slight effect due to the concave (sunk, inwardly curved from the point of view of the membrane) embodiment of the edge regions (16) of the membrane (8). Especially deformations of the membrane (8) which are usually caused by a stress gradient can be significantly reduced.