发明名称 COMPOSITIONS OF TRANSITION METAL SPECIES IN DENSE PHASE CARBON DIOXIDE AND METHODS OF USE THEREOF
摘要 Compositions useful for cleaning metal from a substrate or coating metal onto a substrate are described: Such compositions comprise (a) a densified carbon dioxide continuous phase; (b) a polar discrete phase in said carbon dioxide continuous phase; (c) a metal in said discrete phase (i.e., a metal removed from the substrate, or to be coated onto the substrate); (d) at least one ligand in said continuous phase, said discrete phase, or both said continuous and said discrete phase.
申请公布号 WO2004033758(A2) 申请公布日期 2004.04.22
申请号 WO2003US30702 申请日期 2003.09.30
申请人 MICELL TECHNOLOGIES, INC.;MCCLAIN, JAMES, B.;GROSS, STEPHEN, M.;DEYOUNG, JAMES, P.;WAGNER, MARK, I. 发明人 MCCLAIN, JAMES, B.;GROSS, STEPHEN, M.;DEYOUNG, JAMES, P.;WAGNER, MARK, I.
分类号 C23F1/10;H01L21/306;H01L21/311;H01L21/3205;H01L21/3213 主分类号 C23F1/10
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