发明名称 DROPLET DISCHARGING DEVICE AND ITS WORKPIECE REPLACING METHOD, ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a droplet discharging device with shortened cycle time in work treatment as a whole, and a workpiece replacing method. SOLUTION: This droplet discharging device 1 treats a work by relatively moving a functional droplet discharging nozzle head 8 to the workpiece W and selectively discharging the functional droplets from the head 8. The device is equipped with a first workpiece table 21A and a second workpiece table 21B respectively placing workpiece W, and a workpiece replacement means 3 for alternately placing the treated workpiece W and the untreated workpiece W to the first and the second workpiece tables 21A and 21B. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004121957(A) 申请公布日期 2004.04.22
申请号 JP20020288869 申请日期 2002.10.01
申请人 SEIKO EPSON CORP 发明人 YODA TATSUO
分类号 H05B33/10;B05C5/00;B05C13/02;B05D1/26;B05D3/00;H01L51/50;H05B33/14;(IPC1-7):B05D1/26 主分类号 H05B33/10
代理机构 代理人
主权项
地址