发明名称 |
DROPLET DISCHARGING DEVICE AND ITS WORKPIECE REPLACING METHOD, ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a droplet discharging device with shortened cycle time in work treatment as a whole, and a workpiece replacing method. SOLUTION: This droplet discharging device 1 treats a work by relatively moving a functional droplet discharging nozzle head 8 to the workpiece W and selectively discharging the functional droplets from the head 8. The device is equipped with a first workpiece table 21A and a second workpiece table 21B respectively placing workpiece W, and a workpiece replacement means 3 for alternately placing the treated workpiece W and the untreated workpiece W to the first and the second workpiece tables 21A and 21B. COPYRIGHT: (C)2004,JPO
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申请公布号 |
JP2004121957(A) |
申请公布日期 |
2004.04.22 |
申请号 |
JP20020288869 |
申请日期 |
2002.10.01 |
申请人 |
SEIKO EPSON CORP |
发明人 |
YODA TATSUO |
分类号 |
H05B33/10;B05C5/00;B05C13/02;B05D1/26;B05D3/00;H01L51/50;H05B33/14;(IPC1-7):B05D1/26 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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