发明名称 APPARATUS FOR ALIGNMENT AND ORIENTATION OF A WAFER FOR PROCESSING
摘要 The effector of a robot is constructed with positioning pads at its distal end. The pads provide an accurate registration surface for engagement of the substrate. A pair of idler rollers, which slide along the longitudinal axis of the effector, is moved by an actuator into engagement with the substrate and the assembly urges the substrate against the positioning pads. A pair of wheels is mounted on a platform independent of the effector with one of the wheels driven by a motor. An optical sensor mounted with the wheels detects an orientation mark on the edge of the substrate and allows the driven wheel to rotate the substrate to its specified angular position.
申请公布号 WO2004034430(A2) 申请公布日期 2004.04.22
申请号 WO2003US31577 申请日期 2003.10.07
申请人 BROOKS AUTOMATION, INC. 发明人 CAVENEY, ROBERT, T.
分类号 H01L21/68;H01L21/687 主分类号 H01L21/68
代理机构 代理人
主权项
地址