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发明名称
VERFAHREN ZUR HERSTELLUNG EINES GASDURCHLASSES MIT SELEKTIV WIRKENDER DURCHTRITTSFLÄCHE SOWIE NACH DIESEM VERFAHREN HERGESTELLTER GASDURCHLASS
摘要
申请公布号
DE59610940(D1)
申请公布日期
2004.04.22
申请号
DE19965010940
申请日期
1996.06.01
申请人
LEYBOLD VAKUUM GMBH
发明人
GROSSE BLEY, WERNER;BOEHM, THOMAS;DOEBLER, ULRICH;LACHER, MANFRED;ZETTERER, THOMAS
分类号
B01D53/22;B01D69/00;B01D71/02;G01L19/06;G01M3/20;(IPC1-7):B01D69/00
主分类号
B01D53/22
代理机构
代理人
主权项
地址
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