| 发明名称 |
Differential pumping system and exposure apparatus |
| 摘要 |
A differential pumping system includes a first chamber for storing a light source that emits light, a second chamber that receives light from the first chamber, and a vacuum pump, provided between the first and second chambers, which includes a hollow shaft through which the light passes, and exhausts the hollow shaft.
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| 申请公布号 |
US2004075063(A1) |
申请公布日期 |
2004.04.22 |
| 申请号 |
US20030656727 |
申请日期 |
2003.09.05 |
| 申请人 |
HASEGAWA TAKAYUKI;MIYAKE AKIRA;OGUSHI NOBUAKI |
发明人 |
HASEGAWA TAKAYUKI;MIYAKE AKIRA;OGUSHI NOBUAKI |
| 分类号 |
G21K5/00;F04D19/04;F04D29/053;G03F7/20;G03F7/22;G21K5/02;H01L21/027;(IPC1-7):A61N5/00;G21G5/00 |
主分类号 |
G21K5/00 |
| 代理机构 |
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代理人 |
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