发明名称 METHOD OF MANUFACTURING CUBE, CUBE, AND OPTICAL SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a cube that can be used with any wavelength of light in which bonded prisms come securely optically in contact and optically compatible, which substantially eliminates reflection of bonded surfaces and increases throughput of the light in a system using the cube. SOLUTION: A cube used to perform optical functions in a system, such as beam splitting or polarizing, or both, is manufactured by optically bringing a coated prism in contact with an uncoated prism. The coated prism includes a dielectric stack having alternating layer materials of high and low index of refraction. To ensure secure optical contact between the coated prism and uncoated prism, low interface reflection and good throughput, a contact layer is deposited on the dielectric stack. The contact layer can be fused silica or SiO<SB>2</SB>, which has natural compatibility with CaF<SB>2</SB>materials that make up the uncoated prism and the coating layers. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004126585(A) 申请公布日期 2004.04.22
申请号 JP20030341559 申请日期 2003.09.30
申请人 ASML HOLDING NV 发明人 EDLOU SAMAD M;PETERSON DAVID H
分类号 G02B5/04;C03C27/00;G02B5/28;G02B5/30;G02B27/14;G02B27/28;(IPC1-7):G02B5/04 主分类号 G02B5/04
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