| 摘要 |
PROBLEM TO BE SOLVED: To set and keep a test condition provided for space and heat by minimum energy and labor at a room temperature and low temperature. SOLUTION: In a prober to test a substrate at a low temperature, a chuck 1 can be moved by a chuck driving device 2 in a working area and can be adjusted for the temperature by heating and cooling means, and the chuck is equipped with a containing surface 16 to accept a test substrate 17 and a holding means 10 to fix a substrate supporter 12 containing the test substrate 17. In the prober, a vacuum chamber 3 surrounding the working area of the chuck 1 is located, and the vacuum chamber is connected with a vacuum pump. On the one hand, the chuck 1 is thermally insulated from the chuck driving device 2 not to be cooled, and on the other hand, the chuck is separably connected with the test substrate 17 thermally. The chuck is shielded from a surrounding assembly not to be cooled by a radiation shield 18 to cool the test substrate 17 directly. COPYRIGHT: (C)2004,JPO
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