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发明名称
Verfahren und Vorrichtung zum Antrieb von Beugungsgittern
摘要
申请公布号
DE69728080(D1)
申请公布日期
2004.04.22
申请号
DE19976028080
申请日期
1997.05.30
申请人
JOBIN YVON INC., EDISON
发明人
ZHOU, ANDY;AUBRY, THIERRY;BELSKY, JAMES;REBELLO, JAGDISH;SLUTTER, STEVEN;KATZENBERGER, JOSEPH
分类号
G01J3/06;(IPC1-7):G01J3/06;G01J3/12
主分类号
G01J3/06
代理机构
代理人
主权项
地址
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