| 摘要 |
<p>A device for measuring the extra cellular electrical potential of specimen cells, is new. A device for measuring the extra cellular electrical potential of specimen cells has a substrate in which a well having a bottom surface is formed on a first surface, and a first trap hole is formed towards a second surface, which has a first opening formed from the bottom surface of the well, a first cavity part connected with the first opening by a first connecting part, and a second opening connected with the first opening part by a second connected part and reaching the second surface. The diameter of the first connecting part is smaller than the maximum diameter of the first cavity part, larger than the diameter of the second connecting part and smaller than the diameter of the specimen cells. An independent claim is also included for the manufacture of the device by forming a well having a bottom surface on a substrate, forming a first mask having a first hole on the bottom surface, forming a first cavity by dry etching which forms the first hole using a first gas which controls etching and a second gas which promotes etching, forming a second mask having a second hole on a second surface of the substrate, forming a second opening connected with the first opening by dry etching using the first and second gases, and forming a cavity part to the first and second openings by etching using the second gas.</p> |
