发明名称 Flux cleaning method and method of manufacturing semiconductor device
摘要 An effective method for cleaning flux residues produced in process of fabricating semiconductor devices, and a method of fabricating the semiconductor devices including this cleaning method are provided. The flux cleaning method for cleaning the solder bump electrodes formed using a flux comprises the steps of: applying a pretreatment process including coating of the solder bump electrode with the flux and applying a heat treatment thereto, and carrying out the flux cleaning to clean the heat-treated flux.
申请公布号 US6722557(B2) 申请公布日期 2004.04.20
申请号 US20010860043 申请日期 2001.05.17
申请人 TANAKA TOHRU 发明人 TANAKA TOHRU
分类号 B23K1/20;H01L21/60;H05K3/34;(IPC1-7):B23K1/20;B23K31/02;C23G1/00;C23C30/00 主分类号 B23K1/20
代理机构 代理人
主权项
地址