发明名称 Method for stabilizing oxide-semiconductor interface by using group 5 element and stabilized semiconductor
摘要 The present invention provides a method for stabilizing an oxide-semiconductor interface, which is free from the formation of an interface layer (reactive layer) between a semiconductor and an interface oxide and which thereby allows satisfactory exhibition of performance capabilities of a functional oxide and achievement of the stability of oxide-semiconductor interface, yet independent of temperature; it also provides a stabilized semiconductor.
申请公布号 US6723164(B1) 申请公布日期 2004.04.20
申请号 US20020129983 申请日期 2002.09.24
申请人 JAPAN SCIENCE AND TECHNOLOGY CORPORATION;NATIONAL INSTITUTE FOR MATERIALS SCIENCE 发明人 CHIKYO TOYOHIRO;YOSHIMOTO MAMORU
分类号 H01L21/316;H01L21/8242;H01L27/10;H01L27/108;H01L29/51;(IPC1-7):C30B25/18 主分类号 H01L21/316
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