SEMICONDUCTOR WAFER PROCESSING APPARATUS FOR EASILY CHECKING THE NUMBER OF LOST WAFER AND SEMICONDUCTOR WAFER TREATMENT PROCESS USING THE SAME

摘要

PURPOSE: A semiconductor wafer processing apparatus for easily checking the number of lost wafer and a semiconductor wafer treatment process using the same are provided to be capable of preventing the semiconductor wafers from being lost without the recognition of a user. CONSTITUTION: A semiconductor wafer processing apparatus is provided with a loading/unloading part for loading and unloading a plurality of semiconductor wafers, and a wafer processing part for performing a predetermined treatment process on a semiconductor wafer transferred from the loading/unloading part and transferring the wafer to the loading/unloading part. The semiconductor wafer processing equipment further includes a sensor(410) for checking the first number of the semiconductor wafers loaded to the loading/unloading part and the second number of the semiconductor wafers unloaded from the loading/unloading part, a control part(420) for comparing the first number to the second number and outputting a resultant signal of the comparison, and a display part(430) for outputting the comparison result according to the signal supplied from the control part.