METHOD AND DEVICE FOR GASIFYING SOLID MATERIAL, AND METHOD AND APPARATUS FOR FORMING THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a gasifying method for stably and easily gasifying a solid material. SOLUTION: This method comprises a preparation step of preparing a gasifying solution by dissolving a first solid material into a solvent, a removal step of removing the solvent used for the preparation from the gasifying solution to separate the second solid material, and a sublimation step of sublimating the second solid material to gasify it. COPYRIGHT: (C)2004,JPO