| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing machine which is an extremely compact machine in comparison with a conventional plane polishing machine, and can perform single-faced plane polishing and attain high double-faced machining accuracy. SOLUTION: Polishing is carried out by setting an upper surface plates (1A, 1B), which are coupled with driving source (1A-M, 1B-M) at a position slipped out of the rotational center (O2) of a revolutioning gear (2), on the revolutioning gear (2) which can be rotationally driven by a driving gear (4), then rotating the revolutioning gear (2) and the upper surface plates (1A, 1B) at the same time, reciprocating a lower surface plate (3) on which a work-piece (WK) is secured, and pressing the upper surface plates (1A, 1B) which rotate and revolute to the upper face of the work-piece (WK). COPYRIGHT: (C)2004,JPO
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