DRIVE CIRCUIT FOR MEMS DEVICE AND METHOD OF OPERATION THEREOF

摘要

A drive circuit for a MEMS device, an integrated circuit having a plurality of MEMS devices and drivers, a method of operating the drive circuit and a method of manufacturing the integrated circuit. In one embodiment, the drive circuit includes: (1) an electrode driver and (2) a switching network, coupled to an output of said electrode driver that: (a) in a first configuration, couples said output to a first electrode of an axis of said MEMS device and grounds an opposing second electrode of said axis of said MEMS device and (b) in a second configuration, couples said output to said second electrode and grounds said first electrode.