发明名称 Ceramic joint body
摘要 An object of the present invention is to provide a ceramic bonded body comprising a ceramic substrate and a ceramic body such as a cylindrical body firmly bonded to each other and excellent in corrosion resistance in the ceramic substrate for the use for a semiconductor product producing/examining step. The ceramic bonded body according to the present invention comprises: a ceramic substrate in which a conductor is provided; and a ceramic body bonded to a bottom face of the ceramic substrate The ceramic bonded body has a region, where no conductor is formed, in at least a part of a region above a bonding interface between the ceramic substrate and the ceramic body.
申请公布号 US2004071945(A1) 申请公布日期 2004.04.15
申请号 US20030432639 申请日期 2003.11.06
申请人 ITO YASUTAKA;OHKURA KAZUTERU 发明人 ITO YASUTAKA;OHKURA KAZUTERU
分类号 C04B35/10;C04B35/565;C04B35/581;C04B35/645;C04B37/00;H01L21/00;H01L21/683;(IPC1-7):B32B3/00 主分类号 C04B35/10
代理机构 代理人
主权项
地址