REFLECTING MIRROR MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a reflecting mirror member coated with a high-quality silicon carbide film which has excellent surface smoothness and can be stably manufactured with good reproducibility. SOLUTION: In the reflecting mirror member manufactured by applying the silicon carbide film on a prescribed substrate surface, the silicon carbide film consists of a crystalline oriented film based on X-ray diffraction (however except (111) oriented film) and the maximum inclination angle of the growing direction of the crystal from the perpendicular direction to the substrate surface is≤30°. Further the surface of the silicon carbide film is subjected to plane polishing processing to have≤10Åsurface roughness Rmax. COPYRIGHT: (C)2004,JPO