发明名称 |
Probe sheet, probe card, semiconductor test equipment and semiconductor device fabrication method |
摘要 |
A probe card has first contact terminals electrically connected to the fine-pitch electrodes of a test target; wirings drawn from the first contact terminals; and second contact terminals electrically connected to the wirings, wherein the first contact terminals are formed each using an anisotropically etched hole in a crystalline substrate, and a semiconductor device test method (fabrication method) using the probe card.
|
申请公布号 |
US2004070413(A1) |
申请公布日期 |
2004.04.15 |
申请号 |
US20030676609 |
申请日期 |
2003.10.02 |
申请人 |
KASUKABE SUSUMU;HASEBE TAKEHIKO;NARIZUKA YASUNORI;HASEBE AKIO |
发明人 |
KASUKABE SUSUMU;HASEBE TAKEHIKO;NARIZUKA YASUNORI;HASEBE AKIO |
分类号 |
H01L21/66;G01R1/067;G01R1/073;G01R3/00;(IPC1-7):G01R31/02 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|