| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protective mechanism and method for a positioning device, capable of positively operating a protective circuit by detecting that wire break occurs in a sensor cable or a piezoelectric actuator driving cable during the operation of a shaft not connected with a jogging stage (a piezoelectric actuator) or a positioning function. <P>SOLUTION: This positioning device for jogging stage, which applies a driving voltage (a) corresponding to a command value to a piezoelectric actuator for driving, is provided with a monitoring means which monitors a correlation between the driving voltage of the piezoelectric actuator and a detected value (b) of a positioning means of the jogging stage. It is judged as abnormal if the monitoring result of the monitoring means is out of a prescribed range. <P>COPYRIGHT: (C)2004,JPO |
