| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for joining by which objects can be maintained in desirable surface-activated states even while the objects are transported and the metallic sections can be joined to each other more satisfactorily and easily. SOLUTION: In the method, the objects to be joined respectively having the metallic joining sections 2 and 3 on the surfaces of substrates are transported to a joining section in a state where the joining faces of the sections 2 and 3 are not brought into contact with each other after the joining faces are cleaned with an energy wave in a cleaning section and the sections 2 and 3 are joined to each other after the objects are arranged to face each other in the joining section at the time of joining the objects to each other. In addition, the method includes a step of transporting the objects by holding the objects in a state where the joining faces are exposed to a special gas atmosphere in at least part of the transporting route of the objects from the cleaning section to the position at which the objects face each other in the joining section. The device uses this method. Consequently, the joining faces cleaned with the energy wave of the objects can be maintained in the desirable surface-activated state as much as possible until the faces are joined to each other after the faces are cleaned at the time of joining the objects each other. COPYRIGHT: (C)2004,JPO
|
