FUNCTIONAL MULTILAYERED FILM

摘要

PROBLEM TO BE SOLVED: To provide a functional multilayered film wherein regularity can be incorporated to the arrangement of metal fine particles in the film thickness direction and dispersion density of the metal fine particles in a dielectric can be enhanced.

SOLUTION: The functional film is formed by fixing the multiple metal fine particles 4 to a matrix 1 consisting of the dielectric. The matrix 1 is formed by laminating metal dispersed thin films 5 each consisting of a dielectric thin film 2 film-deposited in a prescribed thickness and the metal fine particles 4 dispersed and disposed on a film surface 3 of the dielectric thin film 2. Barrier films 6 consisting of a material having metal diffusion speed lower than that of the dielectric thin film 2 are film-deposited between the metal dispersion thin films 5.

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