| 摘要 |
PROBLEM TO BE SOLVED: To prevent a contamination of a vacuum chamber, an optical system, a vacuum pump, etc. due to particulates etc. attached to a surface of a sample and scattering into the vacuum chamber and a sample chamber by vacuum pumping. SOLUTION: An X-ray fluorescence analysis apparatus is provided with a hood 22 for enclosing the sample 11 and a sample holder 10 just before the sample holder 10 is mounted to the sample chamber 9. A dust collector 20 operates, sucks and removes the particles etc. attached to the surface of the sample 11 through a duct 21. The particles etc. are prevented from scattering, work for removing the particles etc. scattering into the vacuum chamber 2, a vacuum pumping system, etc. can be eliminated, reliability can be maintained for a long time and maintenance man-hour can be reduced. COPYRIGHT: (C)2004,JPO
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