Rinsing and stripping process for lithography,申请号EP19970122381-传众专利搜索

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发明名称	Rinsing and stripping process for lithography
摘要
申请公布号	EP0851305(B1)	申请公布日期	2004.04.14
申请号	EP19970122381	申请日期	1997.12.18
申请人	CLARIANT FINANCE (BVI) LIMITED	发明人	YAMAMOTO, KENJI;IGAWA, AKIHIKO
分类号	G03F7/16;C11D7/50;G03F7/32;G03F7/42;H01L21/027;(IPC1-7):G03F7/42	主分类号	G03F7/16
代理机构		代理人
主权项
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