METHOD FOR MANUFACTURING SAMPLE PIECE FOR ANALYZING TRANSMISSION ELECTRON MICROSCOPE(TEM)

摘要

PURPOSE: A method for manufacturing a sample piece for analyzing a Transmission Electron Microscope(TEM) is provided to simplify the observation of an analyzing point even when the analyzing point is not clear, wherein the sample is formed with a wide flat surface to analyze by using a Focusing Ion Beam(FIB) unit. CONSTITUTION: In a method for manufacturing a sample piece for analyzing a TEM, a first preliminary sample piece is prepared with a top surface and a side surface as a first surface(104) by cutting a substrate formed with the area by a predetermined size. The top surface includes a predetermined area(50) having an analysis point(P), and the side surface is vertical to the top surface. A secondary preliminary sample piece(110) is prepared by primarily polishing the first surface of the first preliminary sample piece. The secondary preliminary sample piece has a top surface(112) having the predetermined area, and a side surface as a second surface vertical to the top surface and adjacent to the area. The secondary preliminary sample piece has a part existing between the second surface and the predetermined area. The part is primarily etched by FIB, so that a first surface of the predetermined area is formed vertically to the top surface of the second preliminary sample piece. After positioning the first surface of the area vertically to the FIB direction, a part of the first surface is secondarily etched by FIB, thereby obtaining a sample piece with a thickness sufficient for the TEM analysis.