发明名称 Mask ROM structure and manufacturing method thereof
摘要 A mask read-only-memory structure and its method of manufacture are provided. The structure includes a substrate, a buried bit line in the substrate and a patterned stack layer covering a portion of the upper surface of the substrate. The stack layer includes a first dielectric layer, a stopping layer and a second dielectric layer. A gate oxide layer covers a portion of the upper surface of the substrate. A word line runs across the buried bit line to form a plurality of coding cells. The memory cells having a stack layer thereon are at a logic state "0" while the memory cells having a gate oxide layer thereon are at a logic state "1".
申请公布号 US6720210(B1) 申请公布日期 2004.04.13
申请号 US20020065431 申请日期 2002.10.17
申请人 MACRONIX INT CO LTD 发明人 CHANG CHING-YU
分类号 H01L21/8246;H01L27/112;(IPC1-7):H01L21/82 主分类号 H01L21/8246
代理机构 代理人
主权项
地址