发明名称 METHOD OF FORMING THICK SILICA-BASED FILM
摘要 <p>A process for easily and efficiently forming a silica-based coating film having a film thickness of from 0.5 to 5 mu m on a substrate, such a coating film, a coating fluid to be used for forming such a coating film, and a process for producing such a coating fluid, are presented. <??>The present invention provides a process for forming a silica-based coating film, characterized by heating a reaction mixture comprising a silicon compound (A) represented by Si(OR)4 and/or a silicon compound (B) represented by R<1>nSi(OR<2>)4-n (wherein n is an integer of from 1 to 3), an alcohol (C) represented by R<3>CH2OH and oxalic acid (D) in specific ratios, at a temperature of from 50 to 180 DEG C in the absence of water, to form a solution of a polysiloxane having a number average molecular weight, as calculated as polystyrene, of from 2,000 to 15,000, applying a coating fluid containing such a solution on a substrate surface, and thermally curing a coating film obtained by such coating, at a temperature of from 80 to 600 DEG C, and such a coating film having a film thickness of from 0.5 to 5 mu m, a coating fluid to be used for such a coating film, and a process for producing such a coating fluid.</p>
申请公布号 KR20040030591(A) 申请公布日期 2004.04.09
申请号 KR20037013717 申请日期 2003.10.20
申请人 发明人
分类号 C09D183/02;C08G77/08;C09D5/25;C09D183/04;H01L21/312 主分类号 C09D183/02
代理机构 代理人
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