摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost polarized light splitting element such that a transparent substrate is prevented from curving owing to a heat shrinkage of an organic birefringent film caused in micromachining, etc., after the organic birefringent film is bonded. SOLUTION: On the transparent substrate to which the organic birefringent film is bonded, a film which has a larger Young's modulus than the transparent substrate is formed to increase the rigidity of the substrate, thereby reducing warping of the transparent substrate due to a heat shrinkage of the organic birefringent film. COPYRIGHT: (C)2004,JPO
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