发明名称 SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which reduces the space utilized, when mounting a semiconductor element without causing deterioration of element characteristics. SOLUTION: The semiconductor element comprises an air bridge formed so as to coat an element, such as FBAR or the like formed on a surface of a semiconductor substrate via an air gap. The semiconductor device is sealed with a resin, having the air gap for forming the air bridge. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004111767(A) 申请公布日期 2004.04.08
申请号 JP20020274367 申请日期 2002.09.20
申请人 TOSHIBA CORP 发明人 IZEKI YUJI;KAYANO HIROYUKI;ARAKI HIROTA;YASUMOTO YASUAKI;ABE KAZUHIDE;SANO KENYA;OHARA RYOICHI;ITAYA KAZUHIKO;KAWAKUBO TAKASHI
分类号 H01L23/12;H01L23/02;H01L23/08;(IPC1-7):H01L23/08 主分类号 H01L23/12
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