| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate processing device which can carry out the position change of a plurality of substrates readily and promptly. <P>SOLUTION: This is a substrate processing device carried in in that state where it is stored in a general-purpose carrier SC with substrates W in a horizontal position. A dedicated carrier EC used in the inside of the device is laid on a position changing table 231. Also, the position changing table 231 is supported 90°rotatably with an axis 231C as its center. First, the dedicated carrier EC is in the state that the substrates W can be stored in a horizontal position, and a plurality of substrates W are held simultaneously by using a plurality of holding plates 211 to be transferred from the general-purpose carrier SC to the dedicated carrier EC. Next, the position changing table 231 is rotated 90°to change the position of the dedicated carrier EC, and make the substrates W stored in the dedicated carrier EC to be in an uprising position. Thus, the substrate processing device, which treats the substrates W in an uprising position, facilitates and accelerate the position change of the substrates W. <P>COPYRIGHT: (C)2004,JPO</p> |
