| 摘要 |
PROBLEM TO BE SOLVED: To form highly accurately an rugged pattern including elements extending across a plurality of tracks and intersecting the trades on a substrate of a master carrier for magnetic transfer. SOLUTION: When a substrate 31 having a rugged pattern on a surface is made, plotting of a pattern in accordance with the rugged pattern is performed by scanning of an electron beam EB. By reciprocating-vibrating the electron beam EB having a beam diameter being smaller than the minimum width of an element with fixed amplitude in the direction of crossing to a circle direction of a disk 11, while rotating the disk 11 in the one direction A. scanning of the electron beam EB in Y1, Y2, Y3∼Y8 is performed on the disk 11 and plotting of desired element upper surface shape 12a is performed. These operations are repeated for a plurality of tracks and plotting is performed for an element upper surface shape 12a. COPYRIGHT: (C)2004,JPO
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