发明名称 |
Liquid treatment using thin liquid layer |
摘要 |
A treating head having a treating surface and a substrate treatment surface define a thin fluid gap that is filled with reactant liquid to form a thin liquid layer on the substrate for conducting a liquid chemical reaction treatment or other liquid treatment of the substrate. The thin liquid layer has a volume in a range of about from 50 ml to 500 ml. Preferably, the chemical composition, temperature, and other properties of liquid in the thin liquid layer are dynamically variable.
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申请公布号 |
US2004065540(A1) |
申请公布日期 |
2004.04.08 |
申请号 |
US20030609518 |
申请日期 |
2003.06.30 |
申请人 |
NOVELLUS SYSTEMS, INC. |
发明人 |
MAYER STEVEN T.;REID JONATHAN D.;CLEARY TIMOTHY PATRICK;MINSHALL EDMUND B.;STOWELL R. MARSHALL;PARK HEUNG LAK |
分类号 |
C23C18/16;H01L21/00;H01L21/02;H01L21/288;H01L21/306;H01L21/321;H01L21/3213;H01L21/768;(IPC1-7):C25D17/00 |
主分类号 |
C23C18/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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